Structural and thermal modeling of a z-axis rate integrating gyroscope
- Author(s): Painter, C C
- Shkel, A M
- et al.
This paper presents results of structural and thermal modeling of a z-axis rate integrating gyroscope. A strain energy method is used to obtain a structural model of the device, which is verified using finite element analysis. Based on a parametric analysis, an appropriate micromachining technology suitable for the fabrication of the gyroscope is identified. A sensitivity study shows that the operational modes of the proposed gyroscope remain matched under thermal and stress fluctuations, whereas a device with a commonly used H-type suspension shows a 31% frequency mismatch under thermal loading of 23.67degreesC or 9 MPa of compressive stress.
Many UC-authored scholarly publications are freely available on this site because of the UC Academic Senate's Open Access Policy. Let us know how this access is important for you.