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Structural and thermal modeling of a z-axis rate integrating gyroscope

  • Author(s): Painter, C C
  • Shkel, A M
  • et al.
Abstract

This paper presents results of structural and thermal modeling of a z-axis rate integrating gyroscope. A strain energy method is used to obtain a structural model of the device, which is verified using finite element analysis. Based on a parametric analysis, an appropriate micromachining technology suitable for the fabrication of the gyroscope is identified. A sensitivity study shows that the operational modes of the proposed gyroscope remain matched under thermal and stress fluctuations, whereas a device with a commonly used H-type suspension shows a 31% frequency mismatch under thermal loading of 23.67degreesC or 9 MPa of compressive stress.

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