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Open Access Publications from the University of California

Effects of carbon contamination on the printing performance of extreme ultraviolet masks

  • Author(s): Fan, Y.-J.;
  • Yankulin, L.;
  • Antohe, A.;
  • Thomas, P.;
  • Mbanaso, C.;
  • Garg, R.;
  • Wang, Y.;
  • Wuest, A.;
  • Goodwin, F.;
  • Huh, S.;
  • Naulleau, P.;
  • Goldberg, K.;
  • Movhi, I.;
  • Denbeau, G.
  • et al.
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