Lawrence Berkeley National Laboratory
Binary Pseudo-Random Gratings and Arrays for Calibration of Modulation Transfer Function of Surface Profilometers
- Author(s): Barber, Samuel K.
- et al.
In the present work, we describe application of binary pseudo-random gratings (BPRG) and arrays (BPRA) as effective 1D and 2D test surfaces suitable for calibration of different surface profilometers, including a number of interferometric microscopes and scatterometers.