Skip to main content
eScholarship
Open Access Publications from the University of California

Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma

  • Author(s): Jun, S
  • Chang, HY
  • McWilliams, R
  • et al.

Published Web Location

https://doi.org/10.1063/1.2201894Creative Commons Attribution 4.0 International Public License
Abstract

Velocity distribution functions of metastable argon ions (3 d′ 4 F72) have been measured to obtain metastable ion density and temperature by the diode laser-induced fluorescence (LIF) technique in magnetized inductively coupled plasma as a function of pressure, rf power, and magnetic field strength. Calculated density from a rate equation agrees with the trends observed in the experimental data. From the calculation, the metastable ion density should be over 107 cm-3 to obtain a LIF signal. From a dc bias experiment, it is suggested that the spatial potential can be the dominant ion heating source, and a simple global model for ion temperature is constructed. In this model, approximately 0.01% and 10% of total spatial potential energy can contribute to ion and neutral temperatures, respectively. The measured ion temperature agrees with the calculation. © 2006 American Institute of Physics.

Many UC-authored scholarly publications are freely available on this site because of the UC Academic Senate's Open Access Policy. Let us know how this access is important for you.

Main Content
Current View