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X-ray diffraction characterization of suspended structures for MEMS applications

  • Author(s): Goudeau, P.
  • Tamura, N.
  • Lavelle, B.
  • Rigo, S.
  • Masri, T.
  • Bosseboeuf, A.
  • Sarnet, T.
  • Petit, J.-A.
  • Desmarres, J.-M.
  • et al.
Abstract

Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.

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