Skip to main content
eScholarship
Open Access Publications from the University of California

A large displacement, high frequency, underwater microelectromechanical systems actuator

  • Author(s): Hoelzle, DJ
  • Chan, CK
  • Scott, MB
  • Lake, MA
  • Rowat, AC
  • et al.

Published Web Location

https://doi.org/10.1063/1.4905385
Abstract

© 2015 AIP Publishing LLC. Here, we demonstrate an in situ electrostatic actuator that can operate underwater across a wide range of displacements and frequencies, achieving a displacement of approximately 10-μm at 500-Hz and 1-μm at 5-kHz; this performance surpasses that of existing underwater physical actuators. To attain these large displacements at such high speeds, we optimized critical design parameters using a computationally efficient description of the physics of low quality (Q) factor underwater electrostatic actuators. Our theoretical model accurately predicts actuator motion profiles as well as limits of bandwidth and displacement.

Many UC-authored scholarly publications are freely available on this site because of the UC Academic Senate's Open Access Policy. Let us know how this access is important for you.

Main Content
Current View