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Energy Use in Nanoscale Manufacturing

  • Author(s): Zhang, Teresa
  • Boyd, Sarah
  • Vijayaraghavan, Athulan
  • Dornfeld, David
  • et al.
Abstract

This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes.

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