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High efficiency blazed multilayer gratings for EUV and soft x-rays
- Voronov, Dmitriy;
- Cambie, Rossana;
- Ahn, Minseung;
- Anderson, Erik;
- Chang, Chih-Hao;
- Gullikson, Eric;
- Heilmann, Ralf;
- Salmassi, Farhad;
- Schattenburg, Mark;
- Yashchuk, Valeriy;
- Warwick, Tony;
- Goray, Leonid;
- Yang, Sunling;
- Padmore, Howard
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