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Open Access Publications from the University of California

High efficiency blazed multilayer gratings for EUV and soft x-rays

  • Author(s): Voronov, Dmitriy;
  • Cambie, Rossana;
  • Ahn, Minseung;
  • Anderson, Erik;
  • Chang, Chih-Hao;
  • Gullikson, Eric;
  • Heilmann, Ralf;
  • Salmassi, Farhad;
  • Schattenburg, Mark;
  • Yashchuk, Valeriy;
  • Warwick, Tony;
  • Goray, Leonid;
  • Yang, Sunling;
  • Padmore, Howard
  • et al.
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