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Open Access Publications from the University of California

Investigation of the current resolution limits of advanced EUV resists

  • Author(s): Naulleau, Patrick;
  • Rammeloo, Clemens;
  • Cain, Jason P.;
  • Dean, Kim;
  • Denham, Paul;
  • Goldberg, Kenneth A.;
  • Hoef, Brian;
  • La Fontaine, Bruno;
  • Pawloski, Adam;
  • Larson, Carl;
  • Wallraff, Greg
  • et al.
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