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At-wavelength and optical metrology of bendable x-ray optics for nanofocusing at the ALS

  • Author(s): Yashchuk, Valeriy V.
  • et al.
Abstract

We report on a new research and development program at the Advanced Light Source, Lawrence Berkeley National Lab directed to establish both at-wavelength and conventional optical metrology techniques suitable to characterize the surface profile of super-high-quality x-ray optics with sub-microradian precision.

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