Lawrence Berkeley National Laboratory
At-wavelength and optical metrology of bendable x-ray optics for nanofocusing at the ALS
- Author(s): Yashchuk, Valeriy V.
- et al.
We report on a new research and development program at the Advanced Light Source, Lawrence Berkeley National Lab directed to establish both at-wavelength and conventional optical metrology techniques suitable to characterize the surface profile of super-high-quality x-ray optics with sub-microradian precision.