Integrated X-ray and charged particle active pixel CMOS sensor arrays using an epitaxial silicon sensitive region
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Integrated X-ray and charged particle active pixel CMOS sensor arrays using an epitaxial silicon sensitive region

  • Author(s): Kleinfelder, Stuart
  • Bichsel, Hans
  • Bieser, Fred
  • Matis, Howard S.
  • Rai, Gulshan
  • Retiere, Fabrice
  • Weiman, Howard
  • Yamamoto, Eugene
  • et al.
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