Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresists
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Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresists

  • Author(s): McDonough, Laurie A.
  • Chikan, Viktor
  • Kim, Zee Hwan
  • Leone, Stephen R.
  • Hinsberg, William D.
  • et al.
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