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High-purity, isotopically enriched bulk silicon

  • Author(s): Ager III, J.W.
  • Beeman, J.W.
  • Hansen, W.L.
  • Haller, E.E.
  • Sharp, I.D.
  • Liao, C.
  • Yang, A.
  • Thewalt, M.L.W.
  • Riemann, H.
  • et al.
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