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Open Access Publications from the University of California

The Design and Fabrication of Snap-Release Integrated Optomechanical Circuits

  • Author(s): Langman, Eric
  • Advisor(s): Bouwmeester, Dirk
  • et al.
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A fully-integrated optomechanical system is fabricated from a single layer of 400 nm thick stoichiometric LPCVD Si3N4 . Optomechanical coupling is demonstrated between single-mode optical ring resonators and nanomechanical resonators released using our novel ‘snap-release’ mechanism. This mechanism utilizes the high tensile stress of LPCVD Si3N4 to realize sub-50nm distances between optical ring resonators and the released ‘snap-release’ nanobeams (SRNBs). In this dissertation we present the design, fabrication, and characterization of this new optomechanical system.

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This item is under embargo until October 26, 2019.