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Scanning X-ray Microscopy Investigations into the Electron Beam Exposure Mechanism of
Hydrogen Silsesquioxane Resists
- Author(s): Olynick, Deirdre L.;
- Tivanski, Alexei V.;
- Gilles, Mary K.;
- Tyliszczak, Tolek;
- Salmassi, Farhad;
- Liddle, J. Alexander
- et al.
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