Scanning X-ray Microscopy Investigations into the Electron Beam Exposure Mechanism of Hydrogen Silsesquioxane Resists
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Scanning X-ray Microscopy Investigations into the Electron Beam Exposure Mechanism of Hydrogen Silsesquioxane Resists

  • Author(s): Olynick, Deirdre L.;
  • Tivanski, Alexei V.;
  • Gilles, Mary K.;
  • Tyliszczak, Tolek;
  • Salmassi, Farhad;
  • Liddle, J. Alexander
  • et al.
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