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Open questions in electronic sputtering of solids by slow highly
charged ions with respect to applications in single ion implantation
- Author(s): Schenkel, T.
- Rangelow, I.W.
- Keller, R.
- Park, S.J.
- Nilsson, J.
- Persaud, A.
- Radmilovic, V.R.
- Liddle, J.A.
- Grabiec, P.
- Bokor, J.
- Schneider, D.H.
- et al.