Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
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Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
2003
Schenkel, T.
;
Rangelow, I.W.
;
Keller, R.
;
Park, S.J.
;
Nilsson, J.
;
Persaud, A.
;
Radmilovic, V.R.
;
Liddle, J.A.
;
Grabiec, P.
;
Bokor, J.
;
Schneider, D.H.
et al.
...
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