Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
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Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation

  • Author(s): Schenkel, T.
  • Rangelow, I.W.
  • Keller, R.
  • Park, S.J.
  • Nilsson, J.
  • Persaud, A.
  • Radmilovic, V.R.
  • Liddle, J.A.
  • Grabiec, P.
  • Bokor, J.
  • Schneider, D.H.
  • et al.
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