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Open questions in electronic sputtering of solids by slow highly
charged ions with respect to applications in single ion implantation
- Author(s): Schenkel, T.;
- Rangelow, I.W.;
- Keller, R.;
- Park, S.J.;
- Nilsson, J.;
- Persaud, A.;
- Radmilovic, V.R.;
- Liddle, J.A.;
- Grabiec, P.;
- Bokor, J.;
- Schneider, D.H.
- et al.
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