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The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS

Abstract

The autocollimator and moveable pentaprism based DLTP [NIM A 616 (2010) 212-223], a low-budget, NOM-like profiler at the Advanced Light Source (ALS), has been upgraded to provide fast, highly accurate surface slope metrology for long, side-facing, x-ray optics. This instrument arrangement decreases sensitivity to environmental conditions and removes the gravity effect on mirror shape. We provide design details of an affordable base tool. Including Clean-Rm. Environ. Arrangements in the New ALS X-ray Opt. Lab. with Adv. Temp. Stabilization and Turbulence Reduction, That Yield Measurements in under 8 Hours with Accuracy Better Than 30 Nanoradians for Super Polished, 190 Mm Flat Opt., Ltd. Mainly by Residual Temporal Instability of the Exp. Set-up. the Upgraded DLTP Has Been Calibrated for Highly Curved X-ray Opt., Allowing Same Day Measurements of A 15 M ROC Sphere with Accuracy of Better Than 100 Nanoradians . the Developed Calibration Procedure is Discussed in Detail. We Propose This Specific 15 M ROC Sphere for Use As A Round-robin Calibration Test Optic.

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