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Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces.
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https://doi.org/10.1038/s41377-023-01368-zAbstract
An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.
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