Skip to main content
eScholarship
Open Access Publications from the University of California

UC Irvine

UC Irvine Previously Published Works bannerUC Irvine

An Ultrahigh Vacuum Packaging Process Demonstrating Over 2 Million Q-Factor in MEMS Vibratory Gyroscopes

  • Author(s): Asadian, Mohammad H
  • Askari, Sina
  • Shkel, Andrei M
  • et al.

Published Web Location

https://mems.eng.uci.edu/files/2017/11/08064729.pdf
No data is associated with this publication.
Item not freely available? Link broken?
Report a problem accessing this item