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Incompatibility of standard III-V semiconductor processing techniques with terbium doped InGaAs of high terbium concentration

  • Author(s): Ramu, Ashok;
  • Clinger, Laura;
  • Dongmo, Pernell;
  • Imamura, Jeff;
  • Zide, Joshua;
  • Bowers, John
  • et al.
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