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Open Access Publications from the University of California

Multicusp Sources for Ion Beam Lithography Applications

  • Author(s): Leung, K.N.;
  • Herz, P.;
  • Kunkel, W.B.;
  • Perkins, L.;
  • Pickard, D.;
  • Sarstedt, M.;
  • Weber, M.;
  • Williams, M.D.
  • et al.
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