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Multicusp Sources for Ion Beam Lithography Applications

  • Author(s): Leung, K.N.
  • Herz, P.
  • Kunkel, W.B.
  • Perkins, L.
  • Pickard, D.
  • Sarstedt, M.
  • Weber, M.
  • Williams, M.D.
  • et al.
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