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Emergent ferroelectricity in subnanometer binary oxide films on silicon
- Cheema, Suraj S;
- Shanker, Nirmaan;
- Hsu, Shang-Lin;
- Rho, Yoonsoo;
- Hsu, Cheng-Hsiang;
- Stoica, Vladimir A;
- Zhang, Zhan;
- Freeland, John W;
- Shafer, Padraic;
- Grigoropoulos, Costas P;
- Ciston, Jim;
- Salahuddin, Sayeef
Published Web Location
https://doi.org/10.1126/science.abm8642Abstract
The critical size limit of voltage-switchable electric dipoles has extensive implications for energy-efficient electronics, underlying the importance of ferroelectric order stabilized at reduced dimensionality. We report on the thickness-dependent antiferroelectric-to-ferroelectric phase transition in zirconium dioxide (ZrO2) thin films on silicon. The emergent ferroelectricity and hysteretic polarization switching in ultrathin ZrO2, conventionally a paraelectric material, notably persists down to a film thickness of 5 angstroms, the fluorite-structure unit-cell size. This approach to exploit three-dimensional centrosymmetric materials deposited down to the two-dimensional thickness limit, particularly within this model fluorite-structure system that possesses unconventional ferroelectric size effects, offers substantial promise for electronics, demonstrated by proof-of-principle atomic-scale nonvolatile ferroelectric memory on silicon. Additionally, it is also indicative of hidden electronic phenomena that are achievable across a wide class of simple binary materials.
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