Skip to main content
eScholarship
Open Access Publications from the University of California

Revised Optical constants of tantalum for EUV mask absorber materials

  • Author(s): Gullikson, Eric
  • Salmassi, Farhad
  • Aquila, Andy
  • Frederico, Joel
  • Park, Seh-Jin
  • et al.
Main Content
Current View