Skip to main content
eScholarship
Open Access Publications from the University of California

A practical approach for modeling EUVL mask defects

  • Author(s): Gullikson, E.M.;
  • Cerjan, C.;
  • Stearns, D.J.;
  • Mirkarimi, P.B.;
  • Sweeney, D.W.
  • et al.
Main Content
For improved accessibility of PDF content, download the file to your device.
Current View