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Integrated Resonators in an Ultralow Loss Si3N4/SiO2 Platform for Multifunction Applications
- Author(s): Huffman, Taran Arthur;
- Brodnik, Grant M;
- Pinho, Catia;
- Gundavarapu, Sarat;
- Baney, Douglas;
- Blumenthal, Daniel J
- et al.
Published Web Locationhttps://doi.org/10.1109/JSTQE.2018.2818459
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