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Open Access Publications from the University of California

MEMS Applications of CMP

  • Author(s): Hwang, Inkil
  • Dornfeld, David A
  • et al.

In order to keep pace with tight designs for MEMS, CMP has started to be adopted. In this report, some MEMS devices fabricated with CMP are shown, and some possible areas in which CMP can make contribution to are suggested.

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