Skip to main content
Download PDF
- Main
Advanced resist testing using the Berkeley extreme ultraviiolet microfiled exposure tool
- Naulleau, Patrick P.;
- Anderson, Chris N.;
- Dean, Kim;
- Denham, Paul;
- Goldberg, Kenneth A.;
- Hoef, Brian;
- Fontaine, Bruno La;
- Wallow, Tom
Many UC-authored scholarly publications are freely available on this site because of the UC's open access policies. Let us know how this access is important for you.