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Ultra-high accuracy optical testing: creating diffraction-limited short-wavelength optical
systems
- Goldberg, Kenneth A.;
- Naulleau, Patrick P.;
- Rekawa, Senajith B.;
- Denham, Paul E.;
- Liddle, J. Alexander;
- Gullikson, Eric M.;
- Jackson, Keith H.;
- Anderson, Erik H.;
- Taylor, John S.;
- Sommargren, Gary E.;
- Chapman, Henry N.;
- Phillion, Donald W.;
- Johnson, Michael;
- Barty, Anton;
- Soufli, Regina;
- Spiller, Eberhard A.;
- Walton, Christopher C.;
- Bajt, Sasa
- et al.
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