UC Berkeley

Integrated circuits consists of building blocks called transistors. A transistor is a switch that enables logic operations to perform computing. Since the invention of the first integrated circuit, transistors have been scaled down in their dimensions to increase the density of transistors per unit area to enable more functionality. Transistor scaling is continued by introducing novel device structures and materials at each technology node. Due to the challenges such as short channel effects and the power consumption issues, novel materials are investigated as a candidate for next generation transistors. In this thesis, 2-dimensinal layered semiconductors, namely transition metal dichalcogenides (TMDCs) are studied to assess their electronic material properties as a candidate channel material for next generation electronic devices.

Chapter one, introduces the challenges in the state of the art MOSFET devices. Then the motivation for the use of TMDCs in MOSFETs is explained. In chapter two, doping of the TMDCs is studied to be able to probe the intrinsic electronic properties of the devices fabricated using these materials. Contact resistance can be decreased by doping and TMDC MOSFETs with near-ideal performance metrics are demonstrated. In chapter three the CMOS integration of the devices using TMDCs are examined. Logic operations are conducted by fabricating WSe2 n-FETs and p-FETs on the same flake. Then vertical 3-dimensional integration of n-FETs and p-FETs are demonstrated using the same gate. These transistors are connected as a CMOS inverter and logic operations are performed. Chapter four presents the band structure engineering study using TMDCs. Mono-multilayer MoS2 junctions are found to have a type-I heterojunction. Optoelectronic properties of this junction are investigated and the junction is shown to have a photoresponse that dominates the photoresponse coming from the contacts. In chapter five, the tunneling devices using TMDCs are studied. Dual-gated heterojunctions and homojunctions are studied. Gate-tunable diode characteristics of these structures are shown. Then p-TFETs are examined using black phosphorus homojunction devices.