Lawrence Berkeley National Laboratory
Fatigue of polycrystalline silicon for MEMS applications: Crack growth and stability under
resonant loading conditions
- Author(s): Muhlstein, C.L.
- Howe, R.T.
- Ritchie, R.O.
- et al.
Although bulk silicon is not known to exhibit susceptibility to cyclic fatigue, micron-scale structures made from silicon films are known to be vulnerable to degradation by fatigue in ambient air environments, a phenomenon that has been recently modeled in terms of a mechanism of sequential oxidation and stress-corrosion cracking of the native oxide layer.