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Advancing the ion beam thin film planarization process for the smoothing of substrate particles

2004

Mirkarimi, P.;
Spiller, E.;
Baker, S.;
Robinson, J.;
Stearns, D.;
Liddle, J.A.;
Salmassi, F.;
Liang, T.;
Stivers, A.
et al.

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Pathway Evolution Through a Bottlenecking-Debottlenecking Strategy and Machine Learning-Aided Flux Balancing.

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