Skip to main content
eScholarship
Open Access Publications from the University of California

Low-background temperature sensors fabricated on parylene substrates

  • Author(s): Dhar, A
  • Loach, JC
  • Barton, PJ
  • Larsen, JT
  • Poon, AWP
  • et al.
Abstract

Temperature sensors fabricated from ultra-low radioactivity materials have been developed for low-background experiments searching for neutrinoless double-beta decay and the interactions of WIMP dark matter. The sensors consist of electrical traces photolithographically-patterned onto substrates of vapor-deposited parylene. They are demonstrated to function as expected, to do so reliably and robustly, and to be highly radio-pure. This work is a proof-of-concept study of a technology that can be applied to broad class of electronic circuits used in low-background experiments.

Main Content
Current View