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On the pressing need to address beam–sample interactions in atomic resolution electron microscopy

  • Author(s): Kisielowski, C
  • et al.
Abstract

Researchers emphasize on addressing the beam-sample interactions in atomic resolution electron microscopy. The TEAM 0.5 microscope is used as a reference point and compared with resolution predictions since it performs at the leading edge of less than 50 pm of resolution since 8 years in focused and broad-beam modes. Its extraordinary performance is achieved by combining an ultra-twin lens with a short, spherical (Cs)-aberration corrector and exploiting a monochromator using a Nelsonian illumination scheme, such that an image spread of only 10?15 pm is present.

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