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MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness

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We report on a new design approach for X-Y symmetric resonator, emphasizing the increase in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis rate gyroscope (RG), and the concept is compatible with the rate-integrating gyroscope mechanization. Our approach is based on strategically placing the critical mechanical elements at the center of the resonator structure, to mitigate the effect of fabrication imperfections across the device. We experimentally demonstrated that the design yields a sub-Hz frequency separation between operational modes, which is attributed to the introduced design approach. The high symmetry of the device led to a temperature stability of 50 mHz over 130 °C temperature range. A ring down test demonstrated the Q-factor greater than 330 K. The thermal stability and preliminary characterization results of the gyro in-run stability are presented.

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