Building Structures Atom by Atom via Electron Beam Manipulation
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Building Structures Atom by Atom via Electron Beam Manipulation

  • Author(s): Dyck, Ondrej
  • Kim, Songkil
  • Jimenez‐Izal, Elisa
  • Alexandrova, Anastassia N
  • Kalinin, Sergei V
  • Jesse, Stephen
  • et al.

We demonstrate assembly of di-, tri- and tetrameric Si clusters on the graphene surface using sub-atomically focused electron beam of a scanning transmission electron microscope. Here, an electron beam is used to introduce Si substitutional defects and defect clusters in graphene with spatial control of a few nanometers, and enable controlled motion of Si atoms. The Si substitutional defects are then further manipulated to form dimers, trimers and more complex structures. The dynamics of a beam induced atomic scale chemical process is captured in a time-series of images at atomic resolution. These studies suggest that control of the e-beam induced local processes offers the next step toward atom-by-atom nanofabrication and provides an enabling tool for study of atomic scale chemistry in 2D materials.

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