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Open Access Publications from the University of California

A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading

  • Author(s): Ritchie, R.O.
  • et al.

A study has been made of high-cycle fatigue in 2um thick structural films of n+- type, polycrystalline silicon for MEMS applications.

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