A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading

2001

Ritchie, R.O.

Abstract

A study has been made of high-cycle fatigue in 2um thick structural films of n+- type, polycrystalline silicon for MEMS applications.

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Lawrence Berkeley National Laboratory

A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading