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Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets

  • Author(s): Harilal, S S
  • Tillack, M S
  • Tao, Y
  • O'Shay, B
  • Paguio, R
  • Nikroo, A
  • et al.
Abstract

We investigate the extreme-ultraviolet (EUV) emission from targets that contain tin as an impurity and the advantages of using these targets for ion debris mitigation by use of a magnetic field. The EUV spectral features were characterized by a transmission grating spectrograph. The in-band EUV emission energy was measured with a calorimeter of absolute calibration. The ion flux coming from the plume was measured with a Faraday cup. Our studies indicate that 0.5% Sn density is necessary to obtain a conversion efficiency very close to that of full-density Sn. The use of Sn-doped low-Z targets provides a narrower unresolved transition array and facilitates better control of energetic ions in the presence of a moderate magnetic field of 0.64 T. (c) 2006 Optical Society of America.

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