Skip to main content
Open Access Publications from the University of California

UC Irvine

UC Irvine Previously Published Works bannerUC Irvine

Knudsen compressor as a micro- and macroscale vacuum pump without moving parts or fluids

Published Web Location
No data is associated with this publication.

Applications of Knudsen compressors as both microscale and macroscale vacuum pumps have been investigated. The study is based on a cascade analysis incorporating available transitional thermal transpiration and Poiseuille flow results for slender channels. It was found that the Knudsen compressor is an attractive possibility for microscale pumps down to a pressure of about 1 mTorr and for macroscale pumps to about 0.1 mTorr. A microscale pump for a micromass spectrometer providing a molecule flow rate of 5 × 1014 molecules/s results in the following pump characteristics: energy use of 2.4 W, pump volume of 13.9 ml at an inlet pressure of 1 mTorr and an energy use of 28.5 mW, and pump volume of 0.16 ml at an inlet pressure of 10 mTorr. A macroscale pump providing a pumping speed of 103 l/s results in a pump with an energy use of 1786 W, and pump volume of 1695 l at an inlet pressure of 0.1 mTorr. Several Knudsen compressor characteristics such as pressure rise, pumping speed, volume, energy use and mass flow are presented. © 1999 American Vacuum Society.

Many UC-authored scholarly publications are freely available on this site because of the UC's open access policies. Let us know how this access is important for you.

Item not freely available? Link broken?
Report a problem accessing this item