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Micromachined Amperometric Nitrate Sensor with Integrated Microfluidics

  • Author(s): Kim, Dohyun
  • Goldberg, Ira
  • Judy, J W
  • et al.
Abstract

Nitrate-sensing system that consists of a micromachined sensor substrate, nitrate-permeable membrane, integrated microfluidic channels, and standard fluidic connectors has been designed, fabricated, assembled, and tested. Our microsensor was designed for in-situ monitoring of nitrate concentrations in ground water. A silver electrode was patterned for amperometric nitrate detection. An electrochemically oxidized silver electrode was used as a reference electrode. Microfluidic channels were fabricated as flow paths for the eluent and ground-water sample to the microelectrochemical (MEC) cell. The sensor also incorporates a nitrate-permeable membrane that is used for selective measurement of nitrate. The sensor has a linear response over concentration ranging from 1 μM to 1 mM.

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