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Open Access Publications from the University of California

Liberation of ion implanted Ge nanocrystals from a silicon dioxide matrix via hydrofluoric acid vapor etching

  • Author(s): Sharp, I.D.;
  • Xu, Q.;
  • Liao, C.Y.;
  • Ager, J.W.;
  • Beeman, J.W.;
  • Yu, K.M.;
  • Zakharov, D.;
  • Liliental-Weber, Z.;
  • Haller, E.E.
  • et al.
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