Sub-Angstrom metrology of resolution in aberration-corrected transmission electron microscopes using the A-OK standard test specimens
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Sub-Angstrom metrology of resolution in aberration-corrected transmission electron microscopes using the A-OK standard test specimens

  • Author(s): Allard, Lawrence F.
  • O'Keefe, Michael A.
  • et al.
Abstract

Using specimens with diamond cubic and zincblende structures, oriented to provide pairs of atoms in "dumbbell" configurations, we have identified specimens with well-characterized atom separations over a 3:1 range of spacings straddling the canonical 1 Angstrom value. Spacings ranging from 1.6 Angstrom to 0.5 Angstrom are available from an "A-OK" set of test specimens carefully selected for their stability and well-characterized lattice parameters.

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