Demonstration of electronic pattern switching and 10x pattern demagnification in a maskless micro-ion beam reduction lithography system
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Demonstration of electronic pattern switching and 10x pattern demagnification in a maskless micro-ion beam reduction lithography system

  • Author(s): Ngo, V.V.;
  • Akker, B.;
  • Leung, K.N.;
  • Noh, I.;
  • Scott, K.L.;
  • Wilde, S.
  • et al.
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