Ultraviolet femtosecond and nanosecond laser ablation of silicon: Ablation efficiency and laser-induced plasma expansion
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Ultraviolet femtosecond and nanosecond laser ablation of silicon: Ablation efficiency and laser-induced plasma expansion

  • Author(s): Zeng, Xianzhong;
  • Mao, Xianglei;
  • Greif, Ralph;
  • Russo, Richard E.
  • et al.
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