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Scaled ZrO2 dielectrics for In0.53Ga0.47As gate stacks with low interface trap densities

  • Author(s): Chobpattana, Varistha
  • Mates, Thomas E
  • Zhang, Jack Y
  • Stemmer, Susanne
  • et al.

Published Web Location

https://doi.org/10.1063/1.4875977
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