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Operational Energy Use of Plasmonic Imaging Lithography

  • Author(s): Zhang, Teresa
  • Bates, Sarah W.
  • Dornfeld, David
  • et al.
Abstract

Plasmonic imaging lithography (PIL) is a new direct-write lithograghy process based on disk drive technology. Using the benchmark of similarly scaled masked and maskless lithography processes, this paper evaluates the operational energy use of PIL, as a component of manufacturing and environmental impact analysis. This study serves two purposes: to inform the sustainable development of this emerging technology, and to identify PIL as most appropriate for prototyping or highly agile manufacturing of 11 or fewer wafers per design change.

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