- Carey, Benjamin J;
- Ou, Jian Zhen;
- Clark, Rhiannon M;
- Berean, Kyle J;
- Zavabeti, Ali;
- Chesman, Anthony SR;
- Russo, Salvy P;
- Lau, Desmond WM;
- Xu, Zai-Quan;
- Bao, Qiaoliang;
- Kavehei, Omid;
- Gibson, Brant C;
- Dickey, Michael D;
- Kaner, Richard B;
- Daeneke, Torben;
- Kalantar-Zadeh, Kourosh
A variety of deposition methods for two-dimensional crystals have been demonstrated; however, their wafer-scale deposition remains a challenge. Here we introduce a technique for depositing and patterning of wafer-scale two-dimensional metal chalcogenide compounds by transforming the native interfacial metal oxide layer of low melting point metal precursors (group III and IV) in liquid form. In an oxygen-containing atmosphere, these metals establish an atomically thin oxide layer in a self-limiting reaction. The layer increases the wettability of the liquid metal placed on oxygen-terminated substrates, leaving the thin oxide layer behind. In the case of liquid gallium, the oxide skin attaches exclusively to a substrate and is then sulfurized via a relatively low temperature process. By controlling the surface chemistry of the substrate, we produce large area two-dimensional semiconducting GaS of unit cell thickness (∼1.5 nm). The presented deposition and patterning method offers great commercial potential for wafer-scale processes.