Testing the next generation of novel infrared sensorsin a research setting can be a time-consuming and expensive
procedure. To address this challenge, an automated solution for
characterizing miniaturized optical sensing devices is presented.
The system enables rapid, automated characterization of thou-
sands of miniaturized devices. The advantages of this system
include its low cost, high flexibility, and speed. It enables fast and
unique statistical analysis to determine performance and optimal
design parameters by individually testing thousands of devices.
The proposed system uses a single microprobe to individually
test and characterize thousands of devices using optical and RF
interrogation techniques, individually spending 20 seconds on
each sequential device. Without any need for human input the
system allows for the collection of massive amounts of data.
Furthermore, the system can easily adapt to different device
types, chip layouts and light sources. It uses a precision 2D
stage retrofitted with open-source electro-mechanical hardware
and software to allow accessibility to any chip. This versatile
system can be employed to characterize a wide variety of different
devices. Experimentally, the system successfully characterized
thousands of meta-surface enhanced aluminum nitride contour
mode MEMS resonators. The figures of merit evaluated in the
experiments include quality factor, fluctuation-induced noise, re-
sponsivity, and noise equivalent power. The best device observed
was a detector with a noise equivalent power of 85.6 pW/√Hz;
for this device, the quality factor, responsivity, and fluctuation
noise spectral density was found to be 2531, 4.32 Hz/nW, and
0.37 Hz/√Hz . Overall, this automated system offers an efficient
and cost-effective solution for characterizing the next generation
of miniaturized optical sensing devices. It provides researchers
with a powerful tool for data collection and analysis, enabling
quick advancements in the development of IR sensors.