In recent years, detectible noise spectral densities and displacement caused byoptically driven optomechanical cavities have reached near the quantum backaction noise levels, if not at the same level. In addition to these improvements, using squeezed light as drive power has been proposed to increase the sensible noise spectral density beyond backaction, theoretically proving it is possible to go beyond the standard quantum limit (SQL) with quantum readout. Measurements at the thermodynamical bounds include slot-type photonic crystal cavities, which offer strong optomechanical transduction rates for optically pumped RF-readout force and field sense. On the other hand, fabrication and test of those devices introduce challenges.
In this thesis, a new three steps photolithography fabrication process is introduced. Although the current two-step fabrication process works well, it requires very high precision in alignment and etching timing. In this approach, we tried to solve those issues. As a result, we observed well-released devices and transmission loss as low as 24 dB in the preliminary results.
In addition to the new fabrication process, the thesis will introduce the testing and calibration of our optomechanical transducers. Testing the devices is a long and tedious process that involves the alignment of an optical driving source. Theoretical calculations such as mechanical quality factor and sensitivity agree with the data.