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eScholarship
Open Access Publications from the University of California

Scholarly Works (102 results)

  • Article
  • Peer Reviewed
Lawrence Berkeley National Laboratory (2010)
    Cover page: Pushing EUV lithography development beyond 22-nm half pitch
    • Article
    Lawrence Berkeley National Laboratory (2009)
      Cover page: Recent results from the Berkeley 0.3-NA microfield exposure tool
      • Article
      Lawrence Berkeley National Laboratory (2009)
        Cover page: The SEMATECH Berkeley microfield exposure tool: learning a the 22-nm node and beyond
        • Article
        Lawrence Berkeley National Laboratory (2012)
          Cover page: Optical Lithography
          • Article
          Recent Work (2010)
            Cover page: EUV learning at LBNL: past, present and future
            • Article
            Lawrence Berkeley National Laboratory (2011)
              Cover page: Mask roughness challenges in extreme ultraviolet mask development
              • Article
              Lawrence Berkeley National Laboratory (2006)
                Cover page: Characterization of advanced EUV resists using the Berkeley MET tool
                • Article
                Lawrence Berkeley National Laboratory (2011)
                  Cover page: Optical modeling of Fresnel zoneplate microscopes
                  • Article
                  Recent Work (2010)
                    Cover page: Nano-patterning research at LBNL: enabling new science and technologies
                    • Article
                    Lawrence Berkeley National Laboratory (2011)
                      Cover page: EUV Resists: Illuminating the challenges
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