- Guo, Joel;
- McLemore, Charles A;
- Xiang, Chao;
- Lee, Dahyeon;
- Wu, Lue;
- Jin, Warren;
- Kelleher, Megan;
- Jin, Naijun;
- Mason, David;
- Chang, Lin;
- Feshali, Avi;
- Paniccia, Mario;
- Rakich, Peter T;
- Vahala, Kerry J;
- Diddams, Scott A;
- Quinlan, Franklyn;
- Bowers, John E
Lasers with hertz linewidths at time scales of seconds are critical for metrology, timekeeping, and manipulation of quantum systems. Such frequency stability relies on bulk-optic lasers and reference cavities, where increased size is leveraged to reduce noise but with the trade-off of cost, hand assembly, and limited applications. Alternatively, planar waveguide-based lasers enjoy complementary metal-oxide semiconductor scalability yet are fundamentally limited from achieving hertz linewidths by stochastic noise and thermal sensitivity. In this work, we demonstrate a laser system with a 1-s linewidth of 1.1 Hz and fractional frequency instability below 10-14 to 1 s. This low-noise performance leverages integrated lasers together with an 8-ml vacuum-gap cavity using microfabricated mirrors. All critical components are lithographically defined on planar substrates, holding potential for high-volume manufacturing. Consequently, this work provides an important advance toward compact lasers with hertz linewidths for portable optical clocks, radio frequency photonic oscillators, and related communication and navigation systems.